Piezoelectric Thin-Film Actuators
نویسندگان
چکیده
منابع مشابه
Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators.
We present a microfabricated grating whose period can be tuned in analog fashion to within a fraction of a nanometer. The tunable angular range is more than 400 microrad in the first diffracted order. The design concept consists of a diffractive grating defined onto a 400-nm membrane, with the membrane subsequently strained in the direction perpendicular to the grating grooves by thin-film piez...
متن کاملPiezoelectric thin-film superlattices without using piezoelectric materials
In this paper we show that experimentally realizable apparently piezoelectric thin-film superlattices can be created from nonpiezoelectric materials provided an odd-order e.g., trilayer stacking sequence is used. The size-dependent mechanism of flexoelectricity, which couples gradients of strain to polarization, allows such a possibility. We present closed-form analytical expressions for the re...
متن کاملShear Mode Piezoelectric Thin Film Resonators
1.1 Shear mode bulk acoustic wave devices and sensors Acoustic microsensor technique, well known as QCM (Quartz crystal microbalance) or TSM (Thickness shear mode) sensor, is an effective method to detect small mass loading on the sensor surface. This sensor can be operated even in liquid by using shear mode resonance. Therefore, shear mode piezoelectric film resonators are attractive for liqui...
متن کاملOptimal Shape Control of Composite Thin Plates with Piezoelectric Actuators
Emerging technologies in microsensing, microactuation, active airfoils, turbine blades, and large, lightweight, flexible space structures can benefit from piezoelectric actuators for active shape control. Piezoelectric materials develop strain under applied voltage which induces structural deflection. This article presents analytical models, FEM solution, and optimal shape control of composite ...
متن کاملWater-Immersible Micromachined Pb(Zr,Ti)O3 Thin Film Actuators
We demonstrate a water-immersible thin film lead zirconate titanate, Pb(Zr,Ti)O3, [PZT] actuator, without special passivation layer, towards in-vivo or in-vitro scanning probe microscope (SPM) measurements of living cells in water or biological fluids. In order to be water-immersible, the electrodes need to be electrically insulated and the piezoelectric layer needs to be protected against dire...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2017
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.68.387